Abstract: In this article, an antenna system that seamlessly integrates millimeter-wave (mmWave) active phased array modules and an ultrawideband Sub-6 GHz antenna is proposed for future ...
Abstract: In semiconductor manufacturing, to improve the throughput of cluster tools, process modules (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback